MEMS Acceleration Sensor / Capacitive

MEMS acceleration sensor / capacitive

SA

MEMS acceleration sensor / capacitive

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Technology:

MEMS, capacitive
Acceleration range:

Min.: 78 m/s² (255.91 ft/s²)

Max.: 147 m/s² (482.28 ft/s²)
Frequency:

400 Hz

The capacitive acceleration sensors from First Sensor are based on single crystal silicon and utilize the latest micromachining technology. The devices achieve large signal-to-noise ratios and excellent stability over temperature which allows them to detect smallest changes in acceleration. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.

View catalogue Go to the First Sensor AG website for more information

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