Diaphragm Vacuum Pump / Dry / Single-stage / Industrial

diaphragm vacuum pump / dry / single-stage / industrial

iH160 series

diaphragm vacuum pump / dry / single-stage / industrial

Request for quotation

Technology:

diaphragm
Lubrication:

dry
Number of stages:

single-stage

Applications:

industrial
Flow rate:

165 m³/h (5826.92 ft³/h)
Ultimate vacuum:

0.01 mbar (0 psi)

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

View catalogue Go to the EDWARDS website for more information

Products relative

Piston pumps

oil pump / axial piston / high-pressure

oil pump / axial piston / high-pressure

S6CV series are variable displacement, axial piston pumps, with swash plate design, for closed circuit hydrostatic transmissions and high pressure applications. S6CV series are available in 75 and 128 cm3/rev [4.57 and 7.80 in3/rev] and ...

oil pump / electrically-powered / piston / semi-submersible

oil pump / electrically-powered / piston / semi-submersible

Horizontal Transfer Pumps These proven horizontal, valved-piston motor designed transfer pumps were created for simplicity and reliability. They are a cost-effective solution for oil distributors who need to supply pumps for customers ...

grease pump / hand / piston / semi-submersible

grease pump / hand / piston / semi-submersible

Pressure: 0 bar - 413 bar

adhesive pump / air-operated / piston / semi-submersible

adhesive pump / air-operated / piston / semi-submersible

Pressure: 1.4 bar - 8.3 bar

adhesive pump / air-operated / piston / submersible

adhesive pump / air-operated / piston / submersible

PILEDRIVER® III

For more than 10 years, PileDriver III pumps have been recognized as the leader in diverse, demanding industries such as printing and publishing, automotive manufacturing and rotational molding. We’ve upgraded them for improved reliability, ...

oil pump / air-operated / piston / semi-submersible

oil pump / air-operated / piston / semi-submersible

Pressure: 1.4 bar - 8.3 bar

food product pump / pneumatic / piston / stainless steel

food product pump / pneumatic / piston / stainless steel

Flow rate: 0 l/min - 14 l/min
Pressure: 23 bar - 120 bar

food product pump / pneumatic / piston / handling

food product pump / pneumatic / piston / handling

Flow rate: 0 l/min - 68.6 l/min
Pressure: 31 bar - 93.1 bar

Plunger pumps

custom skid-mounted plunger pumping system

custom skid-mounted plunger pumping system

Sonic's Pumping Systems are custom designed to meet your various pumping needs. Our extensive 50 years experience with mechanical and electrical system fabrication uniquely qualifies us to address your applications. In some sense, we've ...

Diaphragm pumps

diaphragm vacuum pump / oil-free / single-stage / compact

diaphragm vacuum pump / oil-free / single-stage / compact

Flow rate: 0.7, 1, 0.6, 0.8 l/min
Ultimate vacuum: -650, -350, -600 mbar

diaphragm vacuum pump / oil-free / single-stage / low-noise

diaphragm vacuum pump / oil-free / single-stage / low-noise

Flow rate: 16.5, 16 l/min
Ultimate vacuum: -870 mbar

diaphragm vacuum pump / oil-free / single-stage / industrial

diaphragm vacuum pump / oil-free / single-stage / industrial

Flow rate: 1 m³/h

diaphragm vacuum pump / oil-free / single-stage / high-performance

diaphragm vacuum pump / oil-free / single-stage / high-performance

Flow rate: 0 m³/h - 2.5 m³/h

diaphragm vacuum pump / oil-free / single-stage / anti-corrosion

diaphragm vacuum pump / oil-free / single-stage / anti-corrosion

HxM, HxMCC series

Flow rate: 17.5 l/min - 43 l/min

diaphragm vacuum pump / dry / single-stage / industrial

diaphragm vacuum pump / dry / single-stage / industrial

Flow rate: 165 m³/h
Ultimate vacuum: 0.01 mbar

diaphragm vacuum pump / lubricated / single-stage / compact

diaphragm vacuum pump / lubricated / single-stage / compact

Flow rate: 1.2, 1.7, 1.4, 0.6 m³/h
Ultimate vacuum: 0 mbar - 2 mbar

diaphragm vacuum pump / oil-free / three-stage / chemical-resistant

diaphragm vacuum pump / oil-free / three-stage / chemical-resistant

Flow rate: 3.4, 3.8 m³/h
Ultimate vacuum: 1.5 mbar

Partners