concentration sensor

FUD-1 Model-122 as the next generation of Model-12 series. It features tighter accuracy and more stable concentration measurement.
Features

The Model-122 is designed for stable concentration monitoring using our new optimization program. Effective on applications requiring high accuracy and stable readings.
Advantages

High accuracy and stability
Almost fee meintenance
Easy installation
Easy operation

Appiactions

Hydroperoxide in CMP slurry
Dilution control for H2O2, TMAH, HNO3, H2SO4, HCl, etc.
Concentration monitoring of HF, NH4OH, KOH, IPA, etc.
Etch rate monitoring of HF, H2SO4, etc.

Principle

The ultrasonic velocity in a liquid is determined by concentration and temperature. FUD-1 measures the velocity and the tempearture accurately, and calcurates the concentration of the liquid from the velocity and the tempearture with the calibration curve stored in the data ROM.