photoelectron spectrometer / MCP / Auger / process

UHV Gemini Electron Column:
highest spatial resolution
smallest e-beam spot size
unique low-energy performance
efficient SEM with in-lens SED

NanoSAM Electron Analyser:
variable energy resolution
excellent sensitivity, multichannel detection

Sample Handling:
flexible sample size
variable sample temperature (50-500K)
sample tilt 60

The NanoSAM Lab is the ultimate tool for the analysis of small structures. Driven by the unique performance of the UHV Gemini electron column, it guarantees unrivalled resolution below 5 nm in Scanning Auger Microscopy (SAM) and better than 3 nm in SEM.

In contrast to other Auger tools, the extremely good resolution is not only available at standard 20 keV beam energy, but even at 5 keV the SAM resolution remains below 10 nm. This allows operation in a parameter range where the Auger cross sections are high, and well documented for quantitative analysis.