Features The Analysis Station is an SEM/EDS integration system which has been developed under the concept of "a fusion of image observation and analysis". Using the SEM's motor driven stage enables wide area observation and analysis. JSM-6510/LA, JSM-6610A/LA series
The EDS analysis can be launched by designating the spot directly on the SEM image. (p61_jed2300f_02.jpg to be embedded) VID
By comparing the collected X-ray spectrum to the synthesized spectrum created using the visual peak ID (VID), quantitative results can be analyzed both visually and numerically. Play Back
In the element map collected with the JEOL EDS, the spectrum is saved at in the pixels of each frame. The images generated by the electron beam are also stored for each frame. The Play Back function provides diverse analysis options, including the observation of the spectrum changes over time. Replaying the data after measurement is completed is also possible, enabling the previously impossible observation of the process of the specimen change over time. Play Back also supports extraction of the desired frames. Smile Station™ 2
This function creates a montage composed of the SEM image and elemental mapping image through an automatic analysis over multiple fields of view. It is also possible to carry out sequential elemental mapping and point analysis on the acquired fields. (patent number 4175597) (p61_jed2300f_03.jpg to be embedded) Dry SD Detector
The Dry SD Detector (SDD Detector), unlike previous detector, requires no liquid nitrogen for cooling. It features quick and easy operation, and realizes both high resolution and high-count-rate processing.
fluorescence spectrometer / energy dispersive X-ray fluorescence / process
