handling automatic guided vehicle

This unit was developed to exchange SMIF Pods from various stations (stockers, storage racks, or processing equipment). It can handle 150 or 200 mm SMIF Pod in a semiconductor fabrication process, and does not require any dedicated space or additional infrastructure. The Adept SPH 2200 is completely mechanized and autonomous unit capable of safely functioning around people without disrupting process flow for repairs, installation or maintenance. The Adept Enterprise manager software is integrated into a facility's general software system, and commands transport requests to the machines. It automatically places the Pods in the appropriate machine at the appropriate time, limiting operator handling, and maintaining a more particle free environment. The unit functions smoothly and without vibration. Unit tracks work in progress, and allows increased production and allows distribution of labor to other tasks.