vertical nanopositioning stage / XYZ / piezoelectric / 3-axis

The PKA-XYZ-400 piezoelectric nanopositioning stage uses a parallel kinematic architecture for high stiffness and resonant frequency with three translational degrees of freedom. It features flexure-guided motion over a nominal 400 um travel range. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal roll and tilt as well as dynamic responsiveness for excellent position stability and control. It is designed to include high-resolution metrology that, when combined with a suitable 3 channel low-noise piezoelectric amplifier, can deliver position resolution of 12 nm or better.

• Open-Loop Travel: 400 micron in X, Y, or Z –
• Closed-Loop Resolution: metrology dependent –
12 nanometers typical
with capacitive probe
• Runout (Ɵх, Ɵу): 450 Hz
• Resonant Freq with 50 g: >400 Hz
• Electrical Capacitance: 32 µF per channel
• Operating Temp Range: 25 to 50 degrees Celsius
• Dimensions: 183 mm diameter
by 77 mm tall
• Material: Stainless steel, titanium
• Ultra-High Vacuum Compatible

• Flexure-guided for smooth, parallel motion
• Minimal and repeatable angular runout
• Option for integrated metrology
• High natural frequencies and rapid response
• Displacement range of 400 µm
• Customizable and scalable for new applications