linear positioning stage / motorized / multi-axis

The Phoenix platform is a dual gantry mechanical bearing platform dedicated to applications like dispensing or flip chip die bonding. It is a 6 axes platform (including 8 motors) moving in X, Y and Z directions. High dynamics, high repeatability and high reliability are key parameters.

This platform features:

Compensation of the thermal effects thanks to an optimized mechanical design allowing very linear deformation of the beam
Gravity compensated Z axes as an option
Low move and settle times thanks to non-linear control, acceleration feedforward and advanced gantry control

Main features

Total stroke: 450 mm in X, 460 mm in Y and 50 mm in Z
Speed: 2 m/s in XY and 1 m/s in Z
Acceleration: 2.5 g in all directions
Accuracy: ±3 µm in XY
Bidirectional repeatability: down to ± 0.5 µm

ETEL also developed technical solutions to cope with higher vertical force requirements as well as higher accuracy at tool point level. Please contact us for more information.