linear positioning stage / motorized / multi-axis
ASME-NPNN-06-0426-0440xx-XYZ
INO Group
![linear positioning stage / motorized / multi-axis](http://ino.vn/uploads/product/14136-10852018.jpg)
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Orientation:
linear
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Type:
motorized
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Number of axes:
multi-axis
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Stroke :
460 mm
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Speed:
2 m/s (6.56 ft/s)
The Phoenix platform is a dual gantry mechanical bearing platform dedicated to applications like dispensing or flip chip die bonding. It is a 6 axes platform (including 8 motors) moving in X, Y and Z directions. High dynamics, high repeatability and high reliability are key parameters.
This platform features:
Compensation of the thermal effects thanks to an optimized mechanical design allowing very linear deformation of the beam
Gravity compensated Z axes as an option
Low move and settle times thanks to non-linear control, acceleration feedforward and advanced gantry control
Main features
Total stroke: 450 mm in X, 460 mm in Y and 50 mm in Z
Speed: 2 m/s in XY and 1 m/s in Z
Acceleration: 2.5 g in all directions
Accuracy: ±3 µm in XY
Bidirectional repeatability: down to ± 0.5 µm
ETEL also developed technical solutions to cope with higher vertical force requirements as well as higher accuracy at tool point level. Please contact us for more information.