linear positioning stage / 1-axis / vacuum-compatible / roller
MVXA07A-R1
INO Group
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Orientation:
linear
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Number of axes:
1-axis
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Other characteristics:
vacuum-compatible, roller
Table Size 70mm×70mm
Guide Mechanism Cross-Roller Guide
Motion Range ±10mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro Step (1/20 div) 0.05μm
Maximum Speed 2.5mm/sec
Accumulated Lead Error ≦10μm/20mm
Repeatability ≦±0.5μm
Lost Motion ≦1μm
Straightness (Horizontal) ≦1μm/20mm
Straightness (Vertical) ≦1μm/20mm
Backlash ≦1μm
Moment Load Stiffness 0.10 arcsec/N・cm
Load Capacity 98N (10kgf)
Material Aluminum Alloy
Weight 0.75kg
Specification (Electrical)
Standard Motor Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Standard Connector Vacuum D-Sub 9Pin