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XY Stage / Translation / Piezoelectric / 2-axis

XY stage / translation / piezoelectric / 2-axis

MS15

INO Group

XY stage / translation / piezoelectric / 2-axis
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  • Orientation:

    XY, translation

  • Type:

    piezoelectric

  • Number of axes:

    2-axis

  • Other characteristics:

    vacuum-compatible, miniature

MS15 xy-mounted (vacuum edition)
for high vacuum conditions up to 10^(-6) mbar 3.5 mm travel in x and y direction 15 x 15 mm footprint
Request now

Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.

Go to the mechOnics ag website for more information
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