Linear Nanopositioning Stage / XYZ / Piezoelectric / 3-axis

linear nanopositioning stage / XYZ / piezoelectric / 3-axis

P-733 series

linear nanopositioning stage / XYZ / piezoelectric / 3-axis

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Orientation:

linear, XYZ
Type:

piezoelectric
Number of axes:

3-axis

Stroke :

Min.: 0 mm

Max.: 1000 mm

P-733 X V and XYZ piezo driven stages are fast and highly accurate nanopositioning and scanning systems. They provide a positioning and scanning range of 100 x 100 pm. 10 pm in Z together with sub- nanometer resolution and are equipped with parallel-metrology capacitive position feedback for superior multi-axis linearity and repeatability. The guiding accuracy minimizes runout to under 10 nm over the whole travel range. In addition, the high-speed Z-axis of the P-733.3CD can actively compensate any out-of-plane Z-axis deviation during XV motion..

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