Piezoelectric Nanopositioner / Linear / 3-axis

piezoelectric nanopositioner / linear / 3-axis

NHL 124 series

piezoelectric nanopositioner / linear / 3-axis

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Type:

piezoelectric
Orientation:

linear
Number of axes:

3-axis

This Bayside Motion Group Nano-Positioning Series - Piezo Ceramic Linear Motor Stages is a multiple-axis level with a .1µm resolution has a rating of 10-10 Torr. With extensive resolution piezo motors on the X and Y axes, it removes servo dither. Its technological system consists of a seamless scanning mechanism which permits the movement of a 300-millimeter wafer underneath an evaluating detector within a vacuum enclosure. It also features standard technical specifications, such as a triple-axis motion command apparatus.

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