electric cylinder / with submicron accuracy

The precision linear actuator comes in vacuum-compatible versions to 10-6 hPa with highest precision. The unit features an extremely low-friction and backlash-free construction with high-quality components. The nonrotating end piece for uniform motion prevents wobble, torque, and wear at the point of contact. The unit includes flat and spherical end piece for decoupling of lateral and tilt forces.

The noncontact limit switches protects the mechanical system. The closed-loop variants with differential encoder driver provides safe position signal transmission at distances up to 10 mm. The position control DC motors are made of gearhead and high-resolution rotary encoders that allow incremental motion and repeatability of just 100 nm. The low-vibration 2-phase stepper motors with gearhead ensures smooth and accurate open-loop positioning