linear nanopositioning stage / XYZ / piezo / 3-axis

Parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act directly on a single motion platform. This means that all axes can be designed with identical dynamic properties, which reduces the moved mass considerably. Further advantages: It is possible to make the parallel-kinematic system more compact than serial stacked or nested systems. The errors and masses of each individual axis do not accumulate.

PICMA® piezo actuators

PICMA® actuators have all‑ceramic insulation and their performance and lifetime are therefore far superior to conventional actuators. The ceramic insulation layer protects the monolithic piezoceramic block against humidity or failure due to increased leakage current. In this way, an especially high reliability is achieved even under extreme ambient conditions. In contrast to motorized drives, there are no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance, and wear.

Flexure guides

A flexure guide is an element which is free of static and sliding friction. It is based on the elastic deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts. Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and wear free. They are 100% vacuum compatible, function in a wide temperature range and do not require any lubricants.