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Orientation:
linear, XYZ
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Type:
piezo
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Number of axes:
3-axis
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Stroke :
20 µm, 60 µm
A non-magnetic, UHV compatible, XYZ nanopositioning piezo stage. Very fast and precise, includes a small footprint and versatile aperture.
Categories: Atomic Force Microscopy (AFM) / Material Science, Multi-Axis Stages, Nanopositioning Piezo Stages, Optics, Three Axes
Installation Drawings
Product Spec Info
Print Specs
Specifications
Part Number 3715257
Footprint 30mm H X 70mm ∅
Aperture 30mm ∅
Material Aluminum
Maximum Load 1 kg
Nanomotion Control XYZ
Closed-loop Travel 60µm|60µm|20µm
Position Noise 0.4nm|0.4nm|0.2nm
Resonant Frequency 750Hz|750Hz|2000Hz
Settling Time 5ms|5ms|2ms
Linearity Deviation 0.03%|0.03%|0.05%
Controller LC.403