linear piezoelectric actuator / high dynamic range / operating temperature up to 150°C
P-010, P-056 series
INO Group
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Movement:
linear
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Other characteristics:
high dynamic range, operating temperature up to 150°C
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Stroke :
Min.: 5 µm
Max.: 120 µm
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Force:
Min.: 1200 N
Max.: 70000 N
Long lifetime without derating. Large displacement, low electrical capacitance.
Sub- nanometer resolution, [is response. Integrated temperature sensor to prevent damage from overheating.
Available options
Bipolar control
SGS sensors for positional stability
PZT ceramic material
Operating voltage range, displacement, layer thickness
Load capacity, force generation
Geometric shapes: rectangular, inner hole
Mechanical interfaces: flat, metal, ceramic, glass, sapphire, etc.
Integrated piezoelectric detector layers
Operating temperature of up to 200 °C
UHV- compatible to lO^hPa
Non- magnetic versions
Extra- tight length tolerances