Linear Positioning Stage / Motorized

linear positioning stage / motorized

linear positioning stage / motorized

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Orientation:

linear
Type:

motorized

Characteristics:
Orientation: Linear
Application: Wafer inspection
Technology: Stepper motors
Travel range: 250 x 250
Repeatability: 0.2 µm
Other characteristics: Integrates with specialised wafer loaders from Olympus (AL120)

Description: These stages are designed to be combined with specialised semiconductor wafer loaders available from Olympus, reducing operator error and fatigue and increasing the rate of wafer inspection. Loading and unloading of wafers is automatic. The repeatability is 0.2 µm and the stage can be driven at up to 40 mm/s. The stage accommodates 200 mm wafers.

View catalogue Go to the Prior Scientific website for more information

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