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Orientation:
linear, XY, Z-axis, XYZ
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Type:
piezo
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Number of axes:
2-axis
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Stroke :
Min.: 50 µm
Max.: 1800 µm
Resolution to 0.1 nm
Positioniergenauigkeit 0.02 %
Direct metrology with capacitive sensors
X, XY, Z, XYZ versions
Products relative
Single-acting hydraulic cylinders
Double-acting hydraulic cylinders
Rotary hydraulic cylinders
linear stage / XY / Z-axis / XYZ