Wafer Inspection And Metrology Nanopositioning System

wafer inspection and metrology nanopositioning system

P-750 series

wafer inspection and metrology nanopositioning system

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Applications:

for wafer inspection and metrology

1 nm lateral guiding accuracy
Frictionless, high- precision flexure guiding
system
Load capacity to 10 kg
Resolution <1 nm
Direct metrology with capacitive sensors for
highest precision
Direct drive for Fast response
Travel range 75 µm
Outstanding lifetime due to PICMA®
piezo
actuators

View catalogue Go to the Physik Instrumente website for more information

Products relative

Single-acting hydraulic cylinders

hydraulic cylinder / single-acting / positioning

hydraulic cylinder / single-acting / positioning

Stroke : 6 mm - 16 mm

hydraulic cylinder / single-acting / hollow-plunger / push tug

hydraulic cylinder / single-acting / hollow-plunger / push tug

Stroke : 8 mm - 155 mm
Force: 125000 N - 931000 N

hydraulic cylinder / single-acting / heavy-duty / brass

hydraulic cylinder / single-acting / heavy-duty / brass

Stroke : 1 in

hydraulic cylinder / single-acting / heavy-duty / high-torque

hydraulic cylinder / single-acting / heavy-duty / high-torque

Stroke : 16 mm - 362 mm
Force: 45000 N - 933000 N

hydraulic cylinder / single-acting load-return / flat / lock-nut

hydraulic cylinder / single-acting load-return / flat / lock-nut

Stroke : 45 mm - 50 mm
Force: 606 kN - 5114 kN

hydraulic cylinder / single-acting / compact / flat

hydraulic cylinder / single-acting / compact / flat

RSM, RCS series

Stroke : 6 mm - 62 mm
Force: 45000 N - 1368000 N

hydraulic cylinder / single-acting / metal alloy / steel

hydraulic cylinder / single-acting / metal alloy / steel

BRC, BRP series

Stroke : 127 mm - 155 mm
Force: 24000 N - 505000 N

hydraulic cylinder / single-acting / clamping / hollow-plunger

hydraulic cylinder / single-acting / clamping / hollow-plunger

Stroke : 12 mm
Force: 60 kN - 104 kN

Double-acting hydraulic cylinders

rotary actuator / hydraulic / double-acting / rack-and-pinion

rotary actuator / hydraulic / double-acting / rack-and-pinion

Force: 74 N - 560 N
Torque: 0.9 Nm - 22 Nm

pneumatic cylinder / hydraulic / double-acting / brass

pneumatic cylinder / hydraulic / double-acting / brass

3/8", max. 500 psi | 3BDD-1

Stroke : 1 in

hydraulic cylinder / double-acting / custom

hydraulic cylinder / double-acting / custom

3/8", max. 500 psi | 3BDD-1

Clippard has developed specialized cylinders that solve users' issue of a lack of customized products for certain applications. These modified cylinders are capable of providing various functions, such as customized framing structuring ...

hydraulic cylinder / double-acting / tie-rod / low-pressure

hydraulic cylinder / double-acting / tie-rod / low-pressure

Stroke : 25 mm - 1500 mm

hydraulic cylinder / double-acting / tie-rod

hydraulic cylinder / double-acting / tie-rod

hydraulic cylinder / double-acting / push tug / round

hydraulic cylinder / double-acting / push tug / round

hydraulic cylinder / double-acting / compact

hydraulic cylinder / double-acting / compact

CHL, CHH series

Stroke : 0 mm - 100 mm
Force: 50300 N - 80400 N
Speed: 0.01 m/s - 0.1 m/s

linear actuator / hydraulic / double-acting

linear actuator / hydraulic / double-acting

The HLM stroke module can be integrated into a modular system for faster assembly. This module is accurate and strong enough to run with a hydraulic dampening setup on the end positions, thus allowing for shorter cycle times. The module ...

Rotary hydraulic cylinders

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rotary actuator / hydraulic / double-acting / rack-and-pinion

Force: 74 N - 560 N
Torque: 0.9 Nm - 22 Nm

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The HTR Series actuator from Parker is fitted with a host of mechanical and hydraulic features making it perfect for top-level industrial applications. Integrated with a host of features like the Tapered Roller Bearings for handling large ...

rotary actuator / hydraulic / double-acting / compact

rotary actuator / hydraulic / double-acting / compact

Torque: 20 Nm - 250000 Nm

rotary actuator / pneumatic / hydraulic

rotary actuator / pneumatic / hydraulic

Torque: 7.5 Nm - 30 Nm

rotary cylinder / hydraulic / double-acting

rotary cylinder / hydraulic / double-acting

Helac Corporation, which has been considered an industry leader for the past 40 years, has successfully developed different hydraulic and helical rotary actuators capable of positioning, supporting and moving rotary loads. Their Helac ...

rotary actuator / hydraulic / double-acting

rotary actuator / hydraulic / double-acting

The L10 series, which are manufactured by Helac, are helical hydraulic actuators. It has a compact, sleek, and cylindrical design and it is ideal to be used where space is a premium. It is capable of offering peak shock resistance, and ...

rotary actuator / hydraulic / rack-and-pinion / double-acting

rotary actuator / hydraulic / rack-and-pinion / double-acting

Helac's L20 series is highly versatile. It is adaptable to a wide array of operations in cost-efficient ways. Provisions have been given for installation in number of ways. Its flange output is adjustable according to requirements. Its ...

rotary actuator / hydraulic / double-acting / aluminum

rotary actuator / hydraulic / double-acting / aluminum

UVRH-30 / ... series

Bore Ø: 30 mm Angles: 60°, 90°, 180° and 360° • Buffer adjustable over 7 mm • Rugged construction, high-quality finish

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