linear nanopositioning stage / 3-axis / compact / high-speed
HS1 APERTURE series
INO Group

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Orientation:
linear
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Number of axes:
3-axis
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Other characteristics:
compact, high-speed, roller
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Stroke :
Min.: 30 µm
Max.: 70 µm
The HS1 Aperture is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 30, 50 or 70µm of range of motion and has a central aperture of 33 mm, making it ideal for optical microscopy applications.
This nanopositioner is part of our high-speed product line (High power controller available).
Features :
High speed, direct drive
Diameter of the aperture : 33mm
Stackable for XY or XYZ motion
30,50 or 70 µm motion
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
Applications :
Interferometry
Nanolithography
3D polymerisation
High speed focusing
Adaptative optics