linear nanopositioning stage / piezoelectric / 1-axis / 3-axis
HS1 series
INO Group

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Orientation:
linear
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Type:
piezoelectric
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Number of axes:
1-axis, 3-axis
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Other characteristics:
high-speed, compact
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Stroke :
Min.: 30 µm
Max.: 70 µm
The HS1 is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 30, 50 or 70µm of range of motion and it can also be proposed with an aperture (see HS1-Aperture).
This nanopositioner is part of our high-speed product line (High power controller available).
Features :
High speed, direct drive
Stackable for XY or XYZ motion
30,50 or 70 µm motion
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
Applications :
Interferometry
Nanolithography
3D polymerisation
Hight speed focusing
Adaptative optics