linear piezoelectric motor

The specially designed Piezo LEGS Caliper 20N motor for integration in linear stages. Its extreme compact size and direct drive proves ideal for high precision motorized stages. The piezo motor solution offers to fit complete motion system inside the stage eliminating any external connection of the stage with bulky electrical motors and linear screws. Piezo LEGS directly operates without gears or mechanical transmission create a backlash free linear motion with nanometer or even sub-nanometer resolution. A conventional electric motor generally requires several assembled parts such as rotor, stator, ball bearings, linear screws etc. With Piezo LEGS direct drive, the motor witnesses a significant reduced size with elimination of bulky and lashing mechanical parts resulting in increased precision. Piezo LEGS, multiple bimorph actuators are co-sintered to a single body with movable legs made out of ceramic “muscles”.