linear positioning stage / linear motor-driven / for microscopes
HLD117
INO Group
![linear positioning stage / linear motor-driven / for microscopes](http://ino.vn/uploads/product/14131-9127637.jpg)
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Orientation:
linear
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Type:
linear motor-driven
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Other characteristics:
for microscopes
Characteristics
• Orientation: Linear
• Technology: Linear motors
• Travel range: 120 x 80 mm
• Speed: 300 mm/s
• Resolution: 0.05 µm
• Accuracy: 0.045 µm
• Repeatability; 0.15 µm
• Smooth movement
Description: HLD117 stages utilise linear motor technology to give a high precision, smooth movement with exceptionally low velocity ripple with speeds from between 0.1 µm to 300 mm per second. A large flat top gives an unimpeded working area and allows the addition of other equipment such as vertical positioning systems. 50 nm encoders are provided as standard and repeatability is 0.15 µm with an accuracy of 0.045 µm. Sample holders are available to accommodate slides, metallurgical samples, semi conductor wafers and other specimen types.