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Options:
sputtering
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Applications:
for micro-optics, optical
A very compact optical sputter coating machine that provides consistent uniform AR and BBAR coatings, high deposition rates and reactive sputtering - especially for micro-optics.
The SP-100 is an extremely fast, flexible sputter coater with multiple process possibilities. Reactive sputtering provides outstanding process stability, simple operation, and flexibility for process innovation. Production of broadband AR coatings with low residual reflections as well as ultra-hard coatings on substrates such as sapphire is possible.
Benefits and features
Excellent reproducibility of coatings is a key strength
Short process times due to rapid pumping and high deposition rates
Magnetron cooling with integrated chiller
Pulsed-DC reactive sputtering for consistent high quality