plasma cleaning machine / automatic / for the electronics industry / for the plastics industry

Automatic tabletop plasma cleaner for research aboratories and low volume production

Typical applications:
Photoresist ashing, descum and silicon wafer cleaning
PDMS, microfluidics, glass slides and lab-on-a-chip
SEM/TEM sample cleaning for hydrocarbon contamination removal
Medical device activation, sterilization and improve coating adhesion
Wire bonding, flip chip underfill, device encapsulation and decapsulation
Improve bonding for metal to metal or composite
Improve bonding for plastic, polymer and composite materials

Features:

Cleaning modes: Immersion plasma cleaning for high speed etching and surface modification; remote plasma cleaning for gentle surface contamination removal, such as SEM/TEM sample cleaning; pulsed operation to generate plasma with average rf power less than 0.5watt for extremely delicate samples.
Operation methods: Automatic recipe execution; automatic job sequence execution; manual operation.
Plasma sensor: dual plasma strength sensor (patent pending) monitors in-situ plasma source and remote plasma source. Plasma strengths are displayed on the LCD touchscreen in real-time.
Advanced process control capabilities: pressure sensor, temperature sensor, gas flow rate meters in MFC, dual plasma strength sensors, automatic impedance matching