ceramic vacuum chuck

CoorsTek's range of ceramic vacuum wafer chucks are made with pure and high quality ceramic that is corrosion resistant to harsh chemicals, and minimizes particle contamination and wafer contact. These wafer chucks have a flat design that enhances yield in semiconductor wafer applications. By reducing surface contact, the product also removes any chance of back-side contaminants disrupting the wafer's composition.

All models in the series are characterized by their size capacity of at least 300mm, rigid and light construction, minimized heat expansion and service wear, as well as its mirror polish finish. Furthermore, these features make the product ideal for complex semiconductor processing equipment.