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Type:
poppet
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Operation:
pneumatic
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Body:
corner, in line, stainless steel
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Applications:
for vacuum, chemical
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Other characteristics:
with bellows seal
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Temperature:
150 °C (302 °F)
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Operating pressure:
Min.: 0 Torr (0 psi)
Max.: 760 Torr (14.7 psi)
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DN:
Min.: 19.05 mm
Max.: 203.2 mm
Formed bellows sealed vacuum valves are typically used for applications with large differential pressures, extremely high cycle rates or “dirty” processes thatfrequentlycause bellows failures. In many vacuum processes, like chemical vapor or thin film deposition, contain particulate contamination. If small particles fall between formed bellows, they have no effect. If similar particles fall between welded or nested bellows, they deform the membranes, cause stress concentration, and lead to early bellows failure. Htc vacuum offers two types of formed bellows sealed stainless valves and aluminum valves, that are angle valve and in-line valve. Htc vacuum designs all series formed bellows seal valves suited for vacuum applications with venting processes,high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
Body : Polished 304 S.S. (Other material available upon request)
Port ODs: 3/4 ~ 8 inch(19.05 ~ 203.2mm)
Bellows: 304 S.S formed bellows
Operation: Air to open, spring to close
Seal: Viton O’ring
Leak rate: 2×10-9 std.cc./second
Pressure range: 2×10-9torr to 760 torr Viton seal bonnet
Operating air pressure: 4 ~ 6 kg/cm2
Bake-out limitation: 150°C