optical microscope / inspection / digital camera / for semiconductors
FS70 series
INO Group
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Type:
optical
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Technical applications:
inspection
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Other characteristics:
digital camera, for semiconductors
Mitutoyo's Metallurgical microscope unit FS70 uses an enhanced optical technology originally based on the highly successful FS60 models.
Considered as an ideal microscope unit of prober stations for semiconductors, the FS70 supports three types of YAG laser wavelength ranges (1064nm, 532nm, and 355nm). The FS70L4, on the other hand, supports two types of wavelength ranges (532nm and 266nm). The expanded scope of usage is applicable to laser cutting of thin-films for semiconductors and liquid crystal substrates with the FS70.
Mitutoyo is not liable for any performance and/or safety quality of the laser system used with Mitutoyo microscopes.